ABOUT
We are WGS, a semiconductor process diagnosis and machine vision specialist company.
Intellectual Property Rights & Awards
| Division | Intellectual Property Applicant | Country of Application | Progress | Application & Registration Number | Intellectual Property (Patent) Name |
|---|---|---|---|---|---|
| patents held | WGS Co.,Ltd. | Korea | patent granted | 10-2208819 | "RF SIGNAL MONITORING APPARATUS AND SYSTEM FOR MONIORING AN ARC EVENT GENERATED IN A PLASMA PROCESS MONIORING AN ARC EVENT GENERATED IN A PLASMA PROCESS" |
| patents held | WGS Co.,Ltd. | Korea | patent granted | 10-2268290 | DIAGNOSTIC SYSTEM FOR DIAGNOSING SEMICONDUCTOR PROCESSING EQUIPMENT AND CONTROL METHOD THEREOF |
| patents held | WGS Co.,Ltd. | Korea | patent granted | 10-2373933 | DIAGNOSTIC SYSTEM FOR DIAGNOSING SEMICONDUCTOR PROCESSING EQUIPMENT AND CONTROL METHOD THEREOF |
| patents held | WGS Co.,Ltd. | China | applications filed |
202110739441.3 | "RF SIGNAL MONITORING APPARATUS AND SYSTEM FOR MONIORING AN ARC EVENT GENERATED IN A PLASMA PROCESS MONIORING AN ARC EVENT GENERATED IN A PLASMA PROCESS" |
| patents held | WGS Co.,Ltd. | Korea | applications filed |
10-2021-0145255 | SWITCH MODULE USING MOVABLE OPTIC CABLE MEMBER AND MULTI CHANNEL SPECTRUM SYSTEM FOR MONITORING PLASMA INCLUDING THE SAME |
| patents held | WGS Co.,Ltd. | Korea | patent granted | 10-2022-0163223 | APPARATUS AND METHOD FOR DETECTING ARC SIGNAL |
| patents held | WGS Co.,Ltd. | Korea | patent granted | 10-2022-0163224 | MULTI CHANNEL SPECTRUM SYSTEM FOR MONITORING PLASMA INCLUDING SWITCHING MODULE |
| patents held | WGS Co.,Ltd. | China | applications filed |
202211181930.2 | SWITCH MODULE USING MOVABLE OPTIC CABLE MEMBER AND MULTI CHANNEL SPECTRUM SYSTEM FOR MONITORING PLASMA INCLUDING THE SAME |
| commercial licenses |
Korea Institute of Machinery & Materials |
Korea | applications filed |
10-2022-0042112 | PATCH TYPE PLASMA DETECTING APPARATUS AND PLASMA DETECTING MODULE HAVING THE SAME |
| commercial licenses |
Korea Institute of Machinery & Materials |
Korea | applications filed |
10-2022-0091722 | ALL-IN-ONE TYPE PLASMA DETECTING APPARATUS |
| commercial licenses |
Korea Institute of Machinery & Materials |
Korea | applications filed |
10-2022-0091723 | THIN-FILM ANTENNA TYPE PLASMA DETECTING APPARATUS AND PLASMA DETECTING MODULE HAVING THE SAME |
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2020
Start-up Business Competition
‘KINGO-GA AIBI’ gold prize Award -
2021
Awarded the 2021 Korea Corporate
Technology Innovation Award -
2022
Awarded the 2022 Korea Enterprise
Award in the technology innovation
category for 2 consecutive years